JPH0272531U - - Google Patents
Info
- Publication number
- JPH0272531U JPH0272531U JP15177288U JP15177288U JPH0272531U JP H0272531 U JPH0272531 U JP H0272531U JP 15177288 U JP15177288 U JP 15177288U JP 15177288 U JP15177288 U JP 15177288U JP H0272531 U JPH0272531 U JP H0272531U
- Authority
- JP
- Japan
- Prior art keywords
- circulation means
- electrode
- controller
- delivering
- cooling solvent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims 4
- 239000002904 solvent Substances 0.000 claims 4
- 238000001312 dry etching Methods 0.000 claims 2
- 238000010992 reflux Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15177288U JPH0272531U (en]) | 1988-11-24 | 1988-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15177288U JPH0272531U (en]) | 1988-11-24 | 1988-11-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0272531U true JPH0272531U (en]) | 1990-06-01 |
Family
ID=31426115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15177288U Pending JPH0272531U (en]) | 1988-11-24 | 1988-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0272531U (en]) |
-
1988
- 1988-11-24 JP JP15177288U patent/JPH0272531U/ja active Pending